| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron spectroscope for preventing deterioration of an electron multiplier as a detector. SOLUTION: Upon instruction of sample cleaning, a central control means 19 feeds to power control means 16 a control signal for applying a preset voltage to an input lens 8 and a control signal for sweeping the analyzing energy of an electrostatic semispherical analyzer 9 from 0 eV to a preset energy value. The central control means 19 further controls a voltage to be applied to a channeltron 10 based on the specified analyzing energy of the analyzer. Namely, when the specified analyzing energy of the electrostatic semispherical analyzer 9 is, for example, 0 eV or larger and 20 eV or smaller during ion etching of a sample, the central control means 19 feeds to the power control means 16 a control signal for stopping of application of the voltage to the channeltron 10.</p> |
