| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle capable of reducing the difference in atmospheric pressure between the inside and outside of the pellicle while preventing dust, etc., from entering into the pellicle and also capable of substituting a gas for the gas in the pellicle. SOLUTION: In the pellicle comprising a frame having vent holes which allow the inside and outside of the pellicle to communicate with each other in lateral faces, an adhesive layer disposed on the top surface of the frame, a pellicle membrane stretched on the frame by way of the adhesive layer and an agglutinant layer disposed on the undersurface of the frame, each of the vent holes pierces through the frame and has a bent part and a sticky inner surface.</p> |
