| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing method which can do a surface processing evenly all over the inner surface of a member. SOLUTION: The inside of insulation member 1, which has a gas barrier feature, is filled with gas 2, and the insulation member 1 is sealed airtightly. By irradiating the insulation member 1 with an electro-magnetic wave 4, the gas 2 filled inside the insulation member 1 is activated. The activated gas 2 is generated all over the inner part of the insulation member 1, and the gas 2, which is activated, is made to reach and brought into contact with all over the inner surface of the insulation member 1. |
