发明名称 CONTROLLED FLUID FLOW AND FLUID MIX SYSTEM FOR TREATING OBJECTS
摘要 A method for treating objects. The method includes supplying a fluid comprising a liquid from a fluid source through an angular direction into a manifold (231); and injecting a treatment chemical into the fluid at the manifold. The method also includes transferring the fluid comprising the treatment chemical to a treatment vessel through a distribution member (223, 225). The distribution member distributes the fluid through a plurality of openings (226, 227). Each of the openings is spatially disposed around the member such that the fluid exits through each of the openings where a lateral velocity component of the fluid through each opening is substantially equal to each other.
申请公布号 WO02062494(A1) 申请公布日期 2002.08.15
申请号 WO2001US45225 申请日期 2001.11.30
申请人 FSI INTERNATIONAL, INC. 发明人 PURI, SURAJ;DHINDSA, IQBAL;MEDEIROS, JOSEPH;GROTHE, PHILLIP, A.
分类号 B08B3/10;H01L21/00;(IPC1-7):B08B3/04;B08B7/04 主分类号 B08B3/10
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