发明名称 |
CONTROLLED FLUID FLOW AND FLUID MIX SYSTEM FOR TREATING OBJECTS |
摘要 |
A method for treating objects. The method includes supplying a fluid comprising a liquid from a fluid source through an angular direction into a manifold (231); and injecting a treatment chemical into the fluid at the manifold. The method also includes transferring the fluid comprising the treatment chemical to a treatment vessel through a distribution member (223, 225). The distribution member distributes the fluid through a plurality of openings (226, 227). Each of the openings is spatially disposed around the member such that the fluid exits through each of the openings where a lateral velocity component of the fluid through each opening is substantially equal to each other.
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申请公布号 |
WO02062494(A1) |
申请公布日期 |
2002.08.15 |
申请号 |
WO2001US45225 |
申请日期 |
2001.11.30 |
申请人 |
FSI INTERNATIONAL, INC. |
发明人 |
PURI, SURAJ;DHINDSA, IQBAL;MEDEIROS, JOSEPH;GROTHE, PHILLIP, A. |
分类号 |
B08B3/10;H01L21/00;(IPC1-7):B08B3/04;B08B7/04 |
主分类号 |
B08B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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