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发明名称
METHOD FOR MAKING A DETACHABLE SEMICONDUCTOR SUBSTRATE AND FOR OBTAINING A SEMICONDUCTOR ELEMENT
摘要
申请公布号
EP1550158(A2)
申请公布日期
2005.07.06
申请号
EP20030780289
申请日期
2003.10.03
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
LAGAHE, CHRYSTELLE;ASPAR, BERNARD;BEAUMONT, AURELIE
分类号
H01L21/762;(IPC1-7):H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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