| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement reduction mechanism which obtains a high displacement reduction rate, which has a high reproducibility of output displacement, and which can be applied to an X/Y biaxial stage or an X/Y/Z triaxial stage. SOLUTION: The displacement reduction mechanism includes an input point 11 and an output point 12, and it is integrally manufactured symmetrically with respect to a reference line 13 extending on the input and output points. The displacement reduction mechanism is provided with: fixed points 15 arranged on both sides of the reference line; first elastic hinge members 16 each having a proximal end connected to the fixed point and a distal end connected to the output point; and a second elastic hinge member 18 located to extend across the reference line perpendicular thereto and having the input point at its center, both ends of which are respectively coupled to the middle portions of the first elastic hinge members. The displacement in the direction of the reference line inputted to the input point is reduced and outputted to the output point through the elastic deformation of the second elastic hinge member and the first elastic hinge members. COPYRIGHT: (C)2005,JPO&NCIPI
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