| 摘要 |
PROBLEM TO BE SOLVED: To provide a seal material, having excellent plasma resistance and reducing the cost, and provide a bonded seal plate to which the seal material is bonded with high adhesive strength. SOLUTION: This composite seal material is characterized in that fluoro-elastomer and a perfluoro-elastomer are stacked through a fluororesin film. The fluororesin film is preferably formed of PTFE or PFA. The bonded seal plate of the invention is characterized in that the composite seal material is bonded to a seal groove of the seal plate with high adhesive strength, the bonding surface of the composite seal material bonded to the seal groove is at least partially formed of fluoro-elastomer, and the exposed surface of the composite seal material is formed of perfluoro-elastomer. COPYRIGHT: (C)2005,JPO&NCIPI
|
