| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus capable of achieving stable glow discharge. SOLUTION: A discharge gas is introduced between a pair of electrodes 2, 3, arranged in parallel and facing to each other, and at the same time, voltage is applied between a pair of the electrodes 2, 3, thereby causing glow discharge under a pressure close to atmospheric pressure. For the plasma treatment apparatus, an object 4 to be treated is introduced between a pair of the electrodes 2, 3, thereby subjecting the object 4 to be treated to plasma treatment. The sections of a pair of the electrodes 2, 3 are formed in a substantially rectangular form, and a curvature is provided at each of corners of the electrodes 2, 3. A dielectric is provided between a pair of the electrodes 2, 3. Plural pairs 70 of electrodes each formed by a pair of the electrodes 2, 3, arranged at an interval 71 between adjacent pairs 70 of electrodes. A discharge gas can be introduced between the electrodes 2, 3 which are arranged facing to each other through the interval 71 between adjacent pairs 70 of electrodes. |
