发明名称 |
Structure for coupling probes of probe device to corresponding electrical contacts on product substrate |
摘要 |
An apparatus for testing integrated circuit devices includes a probe device having a plurality of probes, a first substrate comprising a product substrate having a first surface and an array of electrical contacts disposed on the first surface thereof, and a second substrate disposed between the probes and the first substrate for electrically coupling the probes to corresponding electrical contacts disposed on the first surface of the product substrate.
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申请公布号 |
US2007200572(A1) |
申请公布日期 |
2007.08.30 |
申请号 |
US20060355726 |
申请日期 |
2006.02.16 |
申请人 |
BRETON RONALD R;CHEY S J;CORDES STEVEN A;FARINELLI MATTHEW;FREGEAU MICHAEL D;GOMA SHERIF A;PATRICK GENE T;SHAIKH MOHAMMED S |
发明人 |
BRETON RONALD R.;CHEY S. J.;CORDES STEVEN A.;FARINELLI MATTHEW;FREGEAU MICHAEL D.;GOMA SHERIF A.;PATRICK GENE T.;SHAIKH MOHAMMED S. |
分类号 |
G01R31/02 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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