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发明名称
INTEGRATED CHEMICAL MECHANICAL POLISHING COMPOSITION AND PROCESS FOR SINGLE PLATEN PROCESSING
摘要
申请公布号
EP1899111(A2)
申请公布日期
2008.03.19
申请号
EP20060772376
申请日期
2006.06.06
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
DARSILLO, MICHAEL;WRSCHKA, PETER;WELCH, JAMES;GILES, JEFFREY;STAWASZ, MICHELE;BOGGS, KARL
分类号
B44C1/22;C23F1/00;C23F1/10;H01L21/302
主分类号
B44C1/22
代理机构
代理人
主权项
地址
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