| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method for recognizing the location of a substrate, capable of recognizing the place without requiring additional recognition marks. <P>SOLUTION: In the recognition of the place of the substrate that cannot be entirely housed in a photographable region, only a recognizing mark 2a on one side is housed in the photographable region and is imaged first, the substrate 2 is moved in the substrate-carrying direction (a) and the recognizing mark 2b on the other side is housed in the photographable area, and the imaging is carried out. The true positional relation of the recognizing marks 2a and 2b can be recognized, by adding the movement of the substrate 2 to the positional relation of the recognizing marks 2a and 2b image-sensed when the substrate 2 is positioned at other places, respectively, thus allowing recognition of the location of the substrate 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
