| 摘要 |
The alignment of a probe (81) of a probe card (8) with a TCP test pad (P) is automatically performed by the steps of: obtaining the coordinate data of both the TCP test pad (P) and the probe (81) of the probe card (8) by imaging the test pad (P) and the probe (81), respectively, with a second camera (6b); calculating the displacement between the test pad (P) and the probe (81) from the coordinate data of the test pad (P) and the probe (81); and moving the probe card (8) by using the probe card stage (7) according to the displacement. In this manner, the alignment of the TCP test pad (P) and the probe (81) of the probe card (8) can be performed precisely and easily. |
