发明名称 |
IMPRINTING METHOD AND CURABLE COMPOSITION FOR IMPRINTING |
摘要 |
A curable composition for imprinting in a condensable gas atmosphere, wherein the maximum condensable gas solubility (gas/(curable composition+gas)) (g/g) is 0.1 or more and 0.4 or less, and the curable composition for imprinting has a viscosity of 40 cP or less at 23° C. The maximum condensable gas solubility is determined by charging a 9-ml brown bottle with 3 g of the curable composition, measuring the weight of the curable composition at 23° C. at 1 atm before and after bubbling of the condensable gas at a flow rate of 0.1 L/min for 15 minutes, and dividing the increased weight due to the bubbling by the total weight of the curable composition and the condensable gas. |
申请公布号 |
EP2907156(A4) |
申请公布日期 |
2016.07.13 |
申请号 |
EP20130858407 |
申请日期 |
2013.11.26 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
CHIBA, KEIKO;ITO, TOSHIKI;IIMURA, AKIKO;KAWASAKI, YOUJI;YAMASHITA, KEIJI;KATO, JUN |
分类号 |
H01L21/027;B29C59/02;B29K33/04;C08F20/18;G03F7/031 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|