WAFER MANUFACTURING METHOD, AND MULTIPLE WIRE-EDM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a wafer manufacturing method and a multi-wire EDM apparatus for suppressing that a working liquid supplied from working liquid supply means collides to establish a convection flow thereby to suppress the effect to wash away sawdust.SOLUTION: Working liquid supply means 100B, which is so sided that the distance between a wire R and an ingot I is decreased by the fluctuation of an ingot I, feeds a working liquid F to the ingot I. Working liquid supply means 100A, which is so sided that the distance between the wire R and the ingot I is increased, either stops the working liquid F to be supplied or decreases the quantity of the working liquid F.SELECTED DRAWING: Figure 4