发明名称 DISPLAY APPARATUS AND ENGINEERING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To provide a display apparatus capable of efficiently reengineering a layout drawing.SOLUTION: There is provided a display apparatus having a display unit and a display control unit. The display control unit controls to display a schematic diagram on the display unit, in which symbols of schematic elements are associated with pieces of information of antenna ratio based on a first information respectively. The first information is a piece of information in which the antenna ratio is associated with an identifier of the schematic element. The antenna ratio is a parameter relevant to a plasma damage.SELECTED DRAWING: Figure 8
申请公布号 JP2016167235(A) 申请公布日期 2016.09.15
申请号 JP20150047650 申请日期 2015.03.10
申请人 TOSHIBA CORP 发明人 TAKEMURA TAKESHI
分类号 G06F17/50;H01L21/82;H01L21/822;H01L27/04 主分类号 G06F17/50
代理机构 代理人
主权项
地址