发明名称 Dose compensation by differential pattern scanning
摘要 Precise control of radiation dose distribution over the surface of a workpiece is obtained by differential scanning in accord with a density of scanning traces function. This may be accomplished by differential repetition of the trace in the incremented area dA at generalized coordinates (p,q) of the surface, by frequency modulation of the waveform(s) controlling the scan, by spatial modulation of the scan through choice of scan pattern, or by combinations of these approaches.
申请公布号 US4449051(A) 申请公布日期 1984.05.15
申请号 US19820349293 申请日期 1982.02.16
申请人 VARIAN ASSOCIATES, INC. 发明人 BERKOWITZ, EDWARD H.
分类号 H01J37/317;(IPC1-7):G01N23/00 主分类号 H01J37/317
代理机构 代理人
主权项
地址