DISCHARGE CLEANER

摘要

PURPOSE:To clean the surface of vacuum cleaner and parts without causing damage by constituting the cleaning unit with cathode system, discharge system and glow mode plasma source coupled with bias system. CONSTITUTION:A vacuum exhauster 1 is coupled to one end of a vacuum container 2 while a glow mode plasma source 6 is coupled to the other end and a discharge gas cylinder 4 is provided for said container 2 through Ar gas flow part 5 and a valve 3. A hot-cathode 61 composed of treated tungsten wire is provided in the grounded container 2 then connected to the power source section 62 at the outside of the container 2 while one end is connected through a discharge stabilizing resistor 63 to another grounded power source section 64. Furthermore an anode 65 made of stainless steel mesh covering the cathode 2 is also connected through a stabilizing resistor 66 to another grounded bias power source section 67. Plasma is produced through glow discharge between the cathode 61 and the anode 65 to impinge the ions in the plasma dispersed in the container 2 against the wall face thus to perform cleaning.