Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces,申请号US19890406090-传众专利搜索

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发明名称	Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
摘要
申请公布号	US5017798(A)	申请公布日期	1991.05.21
申请号	US19890406090	申请日期	1989.09.12
申请人	CANON KABUSHIKI KAISHA	发明人	MURAKAMI, EIICHI;KOHNO, MICHIO;SUZUKI, AKIYOSHI
分类号	G01N21/94;G01N21/956	主分类号	G01N21/94
代理机构		代理人
主权项
地址

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