发明名称 OPTICAL DEVICE HAVING CHANNEL TYPE WAVEGUIDE AND PRODUCTION THEREOF
摘要 PURPOSE:To obtain the optical device having a channel type waveguide based on a thin-film waveguide layer having a large light confining effect and excellent crystallinity and optical characteristics. CONSTITUTION:A single crystal thin film is grown on a single crystal substrate 1. The crystallinity and optical characteristics are improved by subjecting the substrate 2 and the thin film to lattice matching. Different elements, for example, Na, Mg, Ti, Cr, Fe, Ni, Co, etc., are thermally diffused in order to reduce the refractive index of the substrate 2 right under the optical waveguide part 3 to be formed in the thin film to the refractive index smaller than the refractive index of the thin film, by which the optical waveguide having the high light confining effect is formed. The light confining effect is high and the crystallinity and optical characteristics are excellent and, therefore, the optical device adequate as an SHG element and polarizer is obtd.
申请公布号 JPH04247407(A) 申请公布日期 1992.09.03
申请号 JP19910031449 申请日期 1991.02.01
申请人 IBIDEN CO LTD 发明人 ONO TETSUSHI
分类号 G02B6/122;G02B6/12;G02B6/13 主分类号 G02B6/122
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