| 摘要 |
PURPOSE:To simplify the manufacturing process of an angular velocity detector, especially, the forming process of electrodes by arranging a reference potential electrode, excitation electrode, and detection electrode on the inner or outer peripheral surface of a cylindrical piezoelectric body. CONSTITUTION:The bottom end of the cylindrical piezoelectric body 2 of a sensor element 10 is fixed to an element table 1 having a disk on the upper end and continuous round bar-like legs on the bottom side. Nearly the upper half of the outer peripheral surface of the piezoelectric body 2 is covered with a reference-potential electrode 3 connected to equipment earth. Eight electrode segments having the same shape are stuck to the lower-half area of the outer peripheral surface at a 45 deg. pitch. Of the electrode segments, the electrode segments 4a and 4b facing each other in a first diametral direction D1 are excitation electrodes. The electrode segments 5a and 5b facing each other in a second diametral direction D2 are feedback electrodes. The electrode segments 6a and 6b facing each other in a third diametral direction D3 are first detection electrodes and the electrode segments 7a and 7b facing each other in a fourth diametral direction D4 are second detection electrodes. |
