| 摘要 |
PROBLEM TO BE SOLVED: To easily supply ozone water with a required concentration to a location where it is used in a wet washing process of an electronic material or the like by promoting the decomposition of ozone of the ozone water where the ozone has been dissolved excessively and adjusting the concentration of the ozone water. SOLUTION: Ozone water where ozone has been dissolved excessively is prepared and the decomposition of ozone is promoted, thus making adjustment to the concentration of ozone water required at a location where it is used. As a means for promoting the decomposition of ozone, the adjustment of the length of water passage path of the ozone water, the heating of the water passage path of the ozone water, the transfer of ultrasonic waves to the water passage path of the ozone water, the application of ultraviolet rays to the water passage path of the ozone water, the turbulence of the water passage path of the ozone water, and the like are listed. Also, the decomposition of the ozone can be promoted also by adding a compound that is oxidized by the ozone or alkali to the water passage path of the ozone water. By sampling sample water for analyzing water quality after completely decomposing the ozone by a means for promoting the decomposition of the ozone, an appropriate water quality analysis value can be obtained.
|
