| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which generates plasma having such a cross-sectional form that plasma density can be uniform over the whole surface of a substrate. SOLUTION: The film-forming apparatus has a vacuum chamber 2, and a pair of plate electrodes 8 and 10 which are placed in parallel so as to face to each other in the vacuum chamber 2, wherein the electrode faces have the same size and same shape as the other, and are flat and rectangular shaped in a plan view. Then, the film-forming apparatus can generate the plasma 16 so as to form the cross-sectional shape approximately parallel to the electrode face of one plate electrode. COPYRIGHT: (C)2007,JPO&INPIT
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