发明名称 PROBE
摘要 [OBJECT] The object of the invention is to provide a probe which, even if it is made into a microstructural form, is capable of providing stabilized electric conduction for an electrode which is a subject to be measured. [CONSTITUTION] A probe (100) comprises a columnar contact (110) capable of contacting an electrode (10), which is a subject to be measured, substantially perpendicularly thereto, and a base end not shown in the drawing, which is a member continuous with the contact (110). The contact (110) has a base (111), and an expansion section (111a) joined to the widthwise end of the base (111). The expansion section(111a) is made of a material greater in coefficient of thermal expansion than the base (111). ® KIPO & WIPO 2007
申请公布号 KR20070029036(A) 申请公布日期 2007.03.13
申请号 KR20057024714 申请日期 2005.05.19
申请人 NATIONAL INSTITUTE FOR MATERIALS SCIENCE;JAPAN ELECTRONICMATERIALS CORP. 发明人 MACHIDA KAZUMICHI;URATA ATSUO;KONNO TAKESHI;ISHIDA AKIRA;EGASHIRA MITSURU;KOBAYASHI MIKIHIKO
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
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