摘要 |
[OBJECT] The object of the invention is to provide a probe which, even if it is made into a microstructural form, is capable of providing stabilized electric conduction for an electrode which is a subject to be measured. [CONSTITUTION] A probe (100) comprises a columnar contact (110) capable of contacting an electrode (10), which is a subject to be measured, substantially perpendicularly thereto, and a base end not shown in the drawing, which is a member continuous with the contact (110). The contact (110) has a base (111), and an expansion section (111a) joined to the widthwise end of the base (111). The expansion section(111a) is made of a material greater in coefficient of thermal expansion than the base (111). ® KIPO & WIPO 2007
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