AIR KNIFE APPARATUS AND SUBSTRATE DRYING APPARATUS HAVING THE SAME

摘要

An air knife apparatus and a substrate dry apparatus including the same are provided to remove and dry liquid of a substrate surface efficiently by using a liquid controlling unit. An air spraying unit(4) is formed on a body portion(1). A liquid controlling portion(2) is located on a front of the body portion to define a liquid dry space(3). The liquid dry space is extended. The liquid controlling portion includes a driving portion controlling volume of the liquid dry space. The driving portion includes a first driving portion and a second driving portion. The first driving portion controls a width(X) of the liquid dry space. The second driving portion controls a height(Z) of the liquid dry unit. The liquid controlling portion includes an X extending portion(220) defining the width of the liquid dry space. The X extending portion includes plural sub-extending portion.