| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means of efficiently cooling an electrode in a rotary electrode type DPP light source. <P>SOLUTION: An EUV light source has an electrode portion, an electrode drive portion, and an electrode cooling portion. The electrode portion makes a target material into plasma by a discharge between a pair of electrodes to emit EUV light from the generated plasma. The electrode drive portion rotates the electrode portion. The electrode cooling portion cools the electrode portion in a non-contact state. <P>COPYRIGHT: (C)2009,JPO&INPIT |
