METHOD OF MAKING MULTICOMPONENT FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of making a multicomponent film.SOLUTION: Described herein is a method and precursor composition for depositing a multicomponent film. In one embodiment, the method and composition described herein are used to deposit a germanium-containing film such as germanium tellurium, antimony germanium, and germanium antimony tellurium (GST) films by atomic layer deposition (ALD) and/or other germanium, tellurium and selenium based metal compounds for phase change memory and photovoltaic materials. In this or other embodiments, the Ge precursor used comprises trichlorogermane.SELECTED DRAWING: None