发明名称 POLISHING COMPOSITION
摘要 Provided is a polishing composition which exhibits favorable storage stability and polishes a polishing object poor in chemical reactivity at a high speed. The invention is a polishing compositionwhich contains silica having an organic acid immobilized on a surface thereof, a dihydric alcohol having a molecular weight of less than 20,000 and a pH adjusting agent, the polishing composition having a pH of 6 or less.
申请公布号 EP2922085(A4) 申请公布日期 2016.07.13
申请号 EP20130855106 申请日期 2013.10.25
申请人 FUJIMI INCORPORATED 发明人 YOKOTA, SHUUGO;SAKABE, KOICHI
分类号 H01L21/3105;C09G1/02;C09K3/14 主分类号 H01L21/3105
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