发明名称 INJECTOR CLEANING APPARATUS
摘要 PURPOSE: An injector cleaning apparatus is provided to reduce a total working process time by cleaning a plurality of injectors, simultaneously. CONSTITUTION: A plurality of fixing grooves are used for fixing a plurality of injectors(10). A plurality of rotary brushes(14) are used for removing powders from the inside of the injectors(10). A control circuit(16) is organically connected with the rotary brushes(14) in order to control operations of the rotary brushes(14). Deionized water is injected into the injectors(10). The rotary brushes(14) are installed at the injectors(10) including the deionized water. The rotary brushes(14) are operated according to a control signal of the control circuit(16). The rotary brushes(14) are rotated to remove powders. The fixing grooves are used for preventing movement of the injectors(10) when the rotary brushes(14) are rotated.
申请公布号 KR20030008291(A) 申请公布日期 2003.01.25
申请号 KR20010043340 申请日期 2001.07.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JONG SEOK
分类号 H01L21/205;(IPC1-7):H01L21/205 主分类号 H01L21/205
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