发明名称 MEASUREMENT METHOD AND MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a measurement method advantageous to simplifying adjustment when calculating information relating to the shape of an object, or advantageous to reducing a measurement time.SOLUTION: This measurement method is designed to calculate information relating to the shape of an object on the basis of an image obtained by capturing the image of the object using an image-capturing element, the method including: an acquisition step S101 for acquiring the design information of the object; a setup step S102 for setting the focus position of an optical system that includes the image-capturing element to a measurement position in the focus direction of the object specified from the design information acquired in the acquisition step S101; an image-capturing step S104 for capturing the image of the object at the focus position set in the setup step S102; and a calculation step S107 for calculating information relating to the shape of the object on the basis of the image captured in the image-capturing step S104.SELECTED DRAWING: Figure 2
申请公布号 JP2016156745(A) 申请公布日期 2016.09.01
申请号 JP20150035776 申请日期 2015.02.25
申请人 CANON INC 发明人 NAKAJIMA MASATAKA;HATADA AKIHIRO;SAITO MASAHIKO
分类号 G01B11/24;G01B11/02 主分类号 G01B11/24
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