| 摘要 |
The present invention relates to an integrated vibration damping digital control system. More specifically, the present invention relates to the integrated vibration damping digital control system, using manual type, semi-active type, and active control type mount modules to integrally control environment vibration generated during operation of ultra-precision equipment and transient response vibration. According to the present invention, the integrated vibration damping digital control system integrally controls the environment vibration generated during operation of the ultra-precision equipment and the transient response vibration by using a digital control method which is insensitive to a noise and has excellent environmental resistance in order to minimize deterioration of a signal caused by analog wiring, so that the present invention is not easily affected by the external noise and maintains uniform control characteristics even if the shape and size of a vibration isolator are different. |
