发明名称 露光装置
摘要 This exposure apparatus is configured by including: a transparent substrate (1); an exposure light source (2), which is disposed on the transparent substrate (1), and which emits exposure light (A); a connecting terminal (3), which is disposed by being laminated on the side opposite to the transparent substrate (1) with the exposure light source (2) therebetween; and a drive electrode (4), which electrically connects the exposure light source (2) and the connecting terminal (3) with each other. The exposure light source can be closely disposed on the substrate by disposing, in such a manner, the exposure light source and the connecting terminal on the substrate by laminating the exposure light source and the connecting terminal in the vertical direction with respect to the substrate.
申请公布号 JP5994091(B2) 申请公布日期 2016.09.21
申请号 JP20120112386 申请日期 2012.05.16
申请人 株式会社ブイ・テクノロジー 发明人 梶山 康一;水村 通伸;金尾 正康;石川 晋
分类号 H01L33/62;B41J2/44;B41J2/45;B41J2/455;H01L51/50;H01S5/022;H05B33/02;H05B33/06 主分类号 H01L33/62
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