FORMING METHOD OF PHOTO RESIST FILM,申请号JP19770091803-传众专利搜索

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发明名称	FORMING METHOD OF PHOTO RESIST FILM
摘要
申请公布号	JPS5426663(A)	申请公布日期	1979.02.28
申请号	JP19770091803	申请日期	1977.07.29
申请人	NIPPON ELECTRIC CO	发明人	HACHIMAN NAOKI
分类号	H01L21/027;H01L21/302	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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