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发明名称
ELECTRON MICROSCOPE EQUIPPED WITH X-RAY-PREVENTING MEANS OF ENERGY FILTER
摘要
申请公布号
JPS6396854(A)
申请公布日期
1988.04.27
申请号
JP19860243535
申请日期
1986.10.14
申请人
JEOL LTD
发明人
OIKAWA TETSUO
分类号
H01J37/22;H01J37/05;H01J37/26
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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