摘要 |
PURPOSE:To improve the uniformity of a magnetic field on the orbit of a charge particle beam by displacing the coil axis of a specific coil among plural coils in the axial direction of the coil relative to the other coil. CONSTITUTION:The race track type coils 1 are parallel in three poles and are so disposed that the directions of the magnetic fields generated by the respective coils are alternated with each other. However, the specific coil, the coil 1 disposed in the central position in this embodiment, is moved along the zigzag orbit in the axial direction of the coil 1 relative to the other coil 1. The zigzag traveling orbit of the charge particle beam passes the central position of the central 2nd coil 1 if the above-mentioned beam is made incident or the axial central position of the 1st coil 1 on the incident side by having a width and forms the zigzag traveling orbit in such constitution. The uniform magnetic fields are, therefore, impressed to the charge particle beam in the central 2nd coil 1 even if the charge particle beam has some width. |