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发明名称
SURFACE TREATING APPARATUS AND METHOD USING VAPOR
摘要
申请公布号
EP0396002(A3)
申请公布日期
1991.01.02
申请号
EP19900107777
申请日期
1990.04.24
申请人
DAINIPPON SCREEN MFG. CO., LTD.
发明人
TANAKA, MASATO, C/O DAINIPPON SCREEN MFG. CO., LTD
分类号
H01L21/00;H01L21/302;H01L21/306;H01L21/311;(IPC1-7):H01L21/311
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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