| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of an indium oxide-zinc oxide based sintered body target capable of obtaining the target high in relative density even if the sintered body having a large size is produced and suppressing the generation of a color shading at a peripheral part and a center part of the sintered body. SOLUTION: In a production method of the indium oxide-zinc oxide based sintered body target, a zinc oxide powder is calcined at 400-800 deg.C, and the calcined zinc oxide power is mixed with an indium oxide powder, then after press molding this powdery mixture, the molded matter is sintered at 1,200-1,400 deg.C. A BET surface area of the zinc oxide powder after calcinating is kept in 0.2-4.0m<2> /g. A temp. raising speed to a sintering temp. at a sintered stage is kept in >=350 deg.C/hr. |
