发明名称 METHOD FOR MANUFACTURING PIXEL ELECTRODE OF REFLECTION TYPE DISPLAY UNIT
摘要 PROBLEM TO BE SOLVED: To simplify a method for forming a pixel electrode of a reflection type liquid crystal display unit. SOLUTION: A pixel electrode 120 of a reflection type liquid crystal display unit is structure from an aluminum film formed by sputtering. When forming a film of this aluminum film, moisture is intentionally contained in the atmosphere, and further a sample is heated. Then, the growth of aluminum particles takes place, and concave and convex parts ofμm order are formed on the surface. Incident lights are diffusedly reflected by the aluminum film, which turns to appear cloudy, and the structure becomes optimum for the pixel electrode of a reflection type liquid crystal display unit.
申请公布号 JPH10144927(A) 申请公布日期 1998.05.29
申请号 JP19960310032 申请日期 1996.11.06
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 ADACHI HIROKI
分类号 G02F1/1335;G02F1/1343;G09F9/35;H01L21/336;H01L29/786;(IPC1-7):H01L29/786;G02F1/134 主分类号 G02F1/1335
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