发明名称 ELLIPSOMETER WITH REVOLVING BIREFRINGENT SHUTTER BLADE
摘要 The invention concerns a device for measuring the birefringent characteristics of a transparent medium (4), in particular a linear or circular birefringent, in which a light beam produced by a laser (1) passes successively through a polariser (6), an optical encoder (10), maintained by a housing (8), the central part of which (24) is rotating and comprises a birefringent shutter blade (22), said transparent medium (4), a circular filter (26) and at least a linear filter, to reach a photodetector (28), for measuring the light flux in one point, this photodetector being associated with computing means (18), characterised in that the polariser (6) placed upstream of the optical encoder (10) is integral with the housing (8) of the latter.
申请公布号 WO9825127(A3) 申请公布日期 1998.09.03
申请号 WO1997FR02214 申请日期 1997.12.05
申请人 ASSOCIATION POUR LA RECHERCHE ET LE DEVELOPPEMENT;ROBERT, ANDRE;FEDOROV, ALEXANDRE 发明人 ROBERT, ANDRE;FEDOROV, ALEXANDRE
分类号 G01N21/21 主分类号 G01N21/21
代理机构 代理人
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