发明名称 Integrated circuit having a void between adjacent conductive lines
摘要 The invention proposes methods for producing integrated circuits wherein the dielectric constant between closely spaced and adjacent metal lines is approaching 1. One method of the invention uses low-melting-point dielectric to form a barrier form a void between conductive lines. Another method of the invention uses sidewall film to form a similar barrier.
申请公布号 US5847439(A) 申请公布日期 1998.12.08
申请号 US19960676537 申请日期 1996.07.09
申请人 MICRON TECHNOLOGY, INC. 发明人 REINBERG, ALAN R.
分类号 H01L21/768;H01L23/482;H01L23/522;H01L23/528;(IPC1-7):H01L29/00;H01L23/58 主分类号 H01L21/768
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