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经营范围
发明名称
FINE PATTERNING METHOD
摘要
申请公布号
KR0165399(B1)
申请公布日期
1999.02.01
申请号
KR19950013692
申请日期
1995.05.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, KYU-CHAN;KIM, ILL-KWAN
分类号
H01L21/30;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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