AN IMPROVED AEROSOL CLEANING APPARATUS,申请号KR19940029899-传众专利搜索

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发明名称	AN IMPROVED AEROSOL CLEANING APPARATUS
摘要
申请公布号	KR0160168(B1)	申请公布日期	1999.02.01
申请号	KR19940029899	申请日期	1994.11.15
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	KRIS, BENKATRAMAN SRIKRISHINAN;JIN, ZWANG WOO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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