SYSTEM AND METHOD FOR ENVIRONMENTAL ANALYSIS IN CLEAN ROOM

摘要

PURPOSE: A system for analyzing the environment of a clean room and a method for analyzing the environment are provided to greatly reduce time for collecting water-soluble pollutant, improve the collecting efficiency and the accuracy, enable on-line analysis work, and analyze absolute value of the density of various water-soluble pollutants. CONSTITUTION: A system for analyzing the environment of a clean room includes a condenser including condensing pipes(10) for passing sample air within the clean room to be analyzed through a passage formed therein, contacting vapor included in the sample air with a wall of the passage for cooling and condensing the vapor, a cooling element cooling the condensing pipes, a vacuum pressure generation element inducing sample air flow within the condensing pipes, a condensed water retrieve element retrieving condensed water condensed in the condensing pipes, and a condensed water supply element supplying the retrieved condensed water to an analyzer; and the analyzer receiving condensed water for analyzing the same.