| 摘要 |
PROBLEM TO BE SOLVED: To restrain air bubbles from adhering to a punching board provided in a cleaning tank so as to prevent air bubbles from impeding a cleaning operation of the cleaning tank, by a method wherein the punching board provided with many holes is formed of material of polyether ether ketone. SOLUTION: A punching board 16 where a large number of holes 16a are provided is arranged at a lower part inside the tank main body 22 of a cleaning tank 20, and a cleaning solution 24 supplied from the lower part of the tank main body 22 is made to hit the surface of a wafer 26 or the like as being straightened through the holes 16a provided to the punching board 16. Moreover, the cleaning tank 20 is composed of a tank main body 22, an overflow pan 28, and the punching board 16. At this point, the tank main body 22 and the overflow pan 28 are formed of polytetrafluoroethylene(PTFE), and the punching board 16 is formed of polyether ether ketone(PEEK), where PEEK is of high hydrophilic nature, so that air bables 38 contained in cleaning solution 24 are hardly attached to the wall surface of the holes 16a and pass smoothly through the holes 16a. By this setup, the holes 16a of the punching board 18 are restrained from being stopped up with, and large air bubbles 38 are restrained from occurring.
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