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发明名称
Method for forming semiconductor films at desired positions on a substrate
摘要
申请公布号
GB0017261(D0)
申请公布日期
2000.08.30
申请号
GB20000017261
申请日期
2000.07.13
申请人
NEC CORPORATION
发明人
分类号
H01L21/027;H01L21/20;H01L21/336;H01L29/786
主分类号
H01L21/027
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代理人
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