POSITIONING DEVICE HAVING THREE COIL SYSTEMS MUTUALLY ENCLOSING ANGLES OF 120掳 AND LITHOGRAPHIC DEVICE COMPRISING SUCH A POSITIONING DEVICE,申请号KR1019997007852-传众专利搜索

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发明名称	POSITIONING DEVICE HAVING THREE COIL SYSTEMS MUTUALLY ENCLOSING ANGLES OF 120掳 AND LITHOGRAPHIC DEVICE COMPRISING SUCH A POSITIONING DEVICE
摘要
申请公布号	KR20000075779(A)	申请公布日期	2000.12.26
申请号	KR1019997007852	申请日期	1999.08.27
申请人		发明人
分类号	G03F9/00	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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