Galvanically producing microstructures on substrate comprises immersing substrate in electrolyte solution and forming contact sites on surface of substrate

摘要

Galvanically producing microstructures on a substrate (1, 2) comprises immersing the substrate in an electrolyte solution (13) and forming contact sites (16) on the surface of the substrate to adjust an electrical current between the substrate and the electrode (12). The surfaces of the contact sites are used to enlarge the surfaces of the substrate. Preferred Features: The contact sites are formed by irradiating a photo lacquer applied to the surface of the substrate and removing the radiated and/or non-radiated regions of the photo lacquer in a lithographic process.