发明名称 Method for manufacturing low power high efficiency non-volatile erasable programmable memory cell structure
摘要 A low power high efficiency non-volatile erasable programmable memory cell structure has a characteristic, distributed, floating gate structure comprising an assembly of independent crystalline silicon crystals. Each crystalline silicon crystal has a diameter of roughly between 10 Å and 100 Å and is separated from the other crystals by a distance greater than 50 Å.
申请公布号 US6331463(B1) 申请公布日期 2001.12.18
申请号 US19990233375 申请日期 1999.01.18
申请人 UNITED MICROELECTRONICS CORP. 发明人 CHEN SHEN-LI
分类号 H01L21/28;H01L21/336;H01L29/423;H01L29/788;(IPC1-7):H01L21/336 主分类号 H01L21/28
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