| 摘要 |
In order to provide a thin film magnetic head having a high performance as well as a method of manufacturing the same, in which throat height TH of a pole portion and MR height MRH can be formed accurately to have desired design values for improving a surface recording density and reducing a side fringe magnetic flux during a writing, after forming a MR element on a substrate 41, 42, a first magnetic film 47 is formed on the MR element, a write gap layer 48 is deposited on the first magnetic layer, a thin film coil 50, 52 supported by a coil supporting insulating layer 51, 53 is formed, a second magnetic layer 54 is formed on the insulating layer, non-magnetic side walls 55a are selectively formed on side surfaces of a pole portion of the second magnetic layer, a part of the write gap layer in the vicinity of the pole portion and a part of the first magnetic layer are selectively removed by anisotropic etching to form a recess 56 while said pole portion and side walls are used as a mask. The air bearing surface is polished with reference to the inner side wall 56a of the recess 56.
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