发明名称 BOTTOM GATE TYPE THIN FILM TRANSISTOR, ITS MANUFACTURING METHOD AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME
摘要 The object of the invention is to provide a bottom gate type thin film transistor and a manufacturing method of it, which can reduce a burden of TFT manufacturing process and thereby a less manufacturing cost is required. A bottom gate type thin film transistor is provided, in which a base layer (1), a gate electrode (2), a gate isolation film (3), and source and drain electrodes (4, 5) are located in this order. The transistor comprises a semiconductor channel layer (6) which is in contact with a portion of the gate isolation film exposed between the source and drain electrodes (4, 5) while being in contact with respective inter-opposite ends of the source and drain electrodes (4,5) and being formed in association with the gate electrode (2). The channel layer (6) is bridged from one of the inter-opposite ends to the other on the upper face side of the source and drain electrodes (4, 5). Contact portions (6c) of the channel layer (6) with the source and drain electrodes (4, 5) form ohmic contact surface layers.
申请公布号 WO0201603(A2) 申请公布日期 2002.01.03
申请号 WO2001EP07189 申请日期 2001.06.25
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V.;YUKAWA, TEIZO 发明人 YUKAWA, TEIZO
分类号 G02F1/136;G02F1/1368;G09F9/30;H01L21/336;H01L29/786 主分类号 G02F1/136
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