SUBSTRATE HOLDER, SUBSTRATE CARRIER ARM, ALIGNER AND SUBSTRATE ALIGNER

摘要

PROBLEM TO BE SOLVED: To remove or reduce the amount of static charges on a substrate caused by breaking. SOLUTION: This substrate holder has a removing function of the static charge that is charged on a substrate P or a suppressing function of the amount of static charge on the substrate. By way of example, a substrate holder 51 is provided with plural charge removing pins 59 that are mounted so as to protrude toward a substrate holding part, and a driving means for driving charge removing pins 59 in the direction that they protrude from the substrate holding part or in the opposite direction.